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Please use this identifier to cite or link to this item: http://hdl.handle.net/2005/1461

Title: Composition Analysis Of NiTi Thin Films Sputtered From A Mosaic Target : Synthesis And Simulation
Authors: Vincent, Abhilash
Advisors: Mohan, S
Keywords: Nickel Titanium Thin Films - Simulation
Microelectromechanical Systems
Simulation Techniques
Sputter Deposition
Thin Films - Deposition
Nickel Titanium Shape Memory Alloys
Mosaic Target Sputtering
Shape Memory Alloys (SMAs)
Thin-film Shape Memory Alloys
NiTi Thin Films
Submitted Date: Nov-2005
Series/Report no.: G19584
Abstract file URL: http://etd.ncsi.iisc.ernet.in/abstracts/1880/G19584-Abs.pdf
URI: http://hdl.handle.net/2005/1461
Appears in Collections:Instrumentation and Applied Physics (iap)

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